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FS8000 Series MEMS Mass Flow Sensors - FS8001/FS8003

• Flow Range: 0~500sccm
• Accuracy: ± (2+0.5FS)
• Repeatability: ± 1.0
• Output: Non-linear, Analog voltage/I2C
• Response Time: 5ms
• High sensitivity
• Low pressure drop
• Miniature design for easy installation

Model Number: FS8001/FS8003

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Product Specification

FS8000 Series Gas Flow Sensors Description
The FS8000 mass Flow sensors are designed and manufactured using MEMS flow sensor and package technology.

The FS8000 mass Flow sensors are developed preliminarily for die-attachment equipment air flow path control during pick and placement, and possibly for other instrumentation applications.

The packaging enclosure id made of the chemically inert and thermally stable polyphenylene sulfite (PPS,FS8001) or polycarbonate (PC, FS8003) material.

The FS8000 requires a power supply of 8~24 Vdc, and provides an analog output of 0.5~4.5 Vdc corresponding to the flow rate from 0 to full scale.

FS8000 Series Gas Flow Sensors Features
- Fast response time
- High sensitivity
- Low pressure drop
- Miniature design for easy installation

FS8000 Series Gas Flow Sensors Mechanical Dimensions

FS8000 Series Gas Flow Sensors Specifications

Parameter	FS8001	FS8003	Unit
Flow Range	(0~500) sccm	(0~6) SLPM
Accuracy	± (2+0.5FS)		%
Repeatability	± 1.0		%FS
Output	Non-linear, Analog voltage/I2C
Analog Output Range	0.5 ~ 4.5		Vdc
Null Shift	< 30		mVdc
Output Shift	< ±0.12		%/℃
Response Time	5		ms
Power Supply	8 ~ 24 Vdc, 50 mA
Operating Current	17		mA
Max. Working pressure	0.5		MPa
Working Temperature	0 ~ +55		℃
Storage Temperature	-20 ~ +65		℃
Humidity	< 95 %RH (No icing or condensation)
Mechanical Connection	M5	Rc 1/8(Inlet), M5 (Outlet)
Connector	SM05B-SRSS-TB (JST)
Calibration	Air (@ 20℃, 101.325kPa)