MEMS Mass Flow/Clog Sensors - FS7002-B/FS7002-C

• Measure open space air flow up to 10 m/sec
• Fast response < 20 msec
• Output: Non-linear, Analog
• Power Supply: 5 ± 5%Vdc
• Operating Current: < 10mA
• Power Consumption: < 50mW
• Working Temperature: -10 ~ +70℃
• Humidity: < 95 %RH(No icing or condensation)

  • Model Number: FS7002-B/FS7002-C
  • Data Sheet: Date Sheet File
Quantity:
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  • MEMS Mass Flow/Clog Sensors
  • MEMS Mass Flow/Clog Sensors
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Product Specification

FS7002 Series MEMS Mass Flow Sensors Description

FS7002 series mass Flow sensors can be used for open air space flow measurement or applied for clog sensing in an open space configuration. The sensor can measure air flow up to 10 m/sec with a fast response. The compact design make the installation an easy task. Examples are clog sensing in LCD projector; HVAC air flow monitoring, air fresher and fan status monitoring.

FS7002 Series MEMS Mass Flow Sensors Features and Applications
- Measure open space air flow up to 10 m/sec
- Fast response < 20 msec
- Compact miniature design
- Excellent sensitivity
- Bi-direction capability
- Additional customization available

FS7002 Series MEMS Mass Flow Sensors Mechanical Dimensions


FS7002 Series MEMS Mass Flow Sensors Specifications

All data unless otherwise noted apply for measurement conditions: air, 20 °C, 101.325 kPa absolute pressure, in a fixed flow channel of 8mm in diameter.

Model
FS7002-B
FS7002-C
Unit
Flow range
0 ~ 5
0 ~ 10
m/s
Repeatability
± 3
± 2
%FS
Response Time
20 ms
Output
Non-linear, Analog

Null Output1
0.2 ~ 0.8
Vdc
Full Scale Output1
2.5 ~ 3.3
Vdc
Power Supply
5 ± 5%
Vdc
Operating Current2
< 10
mA
Power Consumption
< 50
mW
Output Load
Sourcing: 14; Sinking: 11
mA
Pins Out
3 Pin, 2.54 mm centers, 0.635 mm square

Working Temperature
-10 ~ +70

Storage Temperature
-20 ~ +80
Humidity
< 95 %RH(No icing or condensation)

1 To obtain accurate flow measurement, let the sensor warm up 1 minute at power up.
2 The operating current is measured at 5.0 V supply without output load.


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