MEMS Mass Flow Sensor - FS4003
• Flow Range: 0 ~ 2, 3, 4, 5 SLPM
• Turn-down Ratio: >100:1
• Accuracy: ±(1.5 + 0.2 FS)%
• Repeatability: ± 0.25% Reading
• Null Shift: ± 30mV
• Output Shift: ± 0.12%/°C
• Pressure Drop (Max.): < 100Pa
• Max. Working Pressure: 0.5MPa
• Power Supply: 8 ~ 24 Vdc, 50 mA
- Model Number: FS4003
- Data Sheet:
- Quantity:
- - +
Product Specification
FS4003 Gas Mass Flow Sensor description
FS4003 mass flow sensors are designed for general purpose flow monitor and control applications, and are made with Siargo's world leading proprietary MEMS mass flow sensors and the smart electronic control system. The sensors directly measure mass flow in the designed channel with a low pressure loss. These sensors can readily be applied for electronics flow meters for anesthesia equipments, clean room air flow or nitrogen flush monitor and control, environmental equipments such as air sampler, analytical instrumentation such as GC spectrometer.
FS4003 has a flow channel diameter of 3 mm. This sensors have a very low pressure loss while it can measure air flow up to 5 SLPM. Applications include leakage detection, particle counter, and analytical instrumentation.
FS4003 Gas Mass Flow Sensor Features and Applications
- Designed for 3 and 8 mm package
- Mass flow detectable from 0 ~ 2 SLPM to 0 ~ 50 SLPM
- Exchangeable connectors for easy installation
- Digital and analog output provide easy access for various communications
- Compact design ready for multiple channel assembly
- Excellent for electronic meters in anesthesia equipment
- Fast response and low power consumption
- Low pressure loss
FS4003 Gas Mass Flow Sensor Mechanical Dimensions
FS4003 Gas Mass Flow Sensor Specifications
Model
FS4003
unit
Flow Range
0 ~ 2, 3, 4, 5
SLPM
Turn-down Ratio
>100:1
Accuracy
±(1.5 + 0.2 FS)
%
Repeatability
± 0.25
%Reading
Null Shift
± 30
mV
Output Shift
± 0.12
%/°C
Response Time
10 (Default, 50, 100, 200, 500, 1000 selectable)
ms
Output
Linear: Analog 0.5 ~ 4.5 Vdc / Diaital RS232 or RS458
Pressure Drop (Max.)
< 100
Pa
Max. Working Pressure
0.5
MPa
Power Supply
8 ~ 24 Vdc, 50 mA
Operating Current
16 typical when RS232/RS458 not connected
mA
18 typical when RS232/RS458 communicates with a PC
Power Consumption
<220
mW
Analog Output Load
Sourcing: 14
mA
Sinking: 11
Working Temperature
-5 ~ +55
°C
FS4003 Gas Mass Flow Sensor Product Selection
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