MEMS Mass Flow Sensors - FS5001B Series

- Low mass flow detectable from 0 ~ 200 sccm up to 0 ~ 1000 sccm
- Outstanding accuracy of 2.0%
- Response time < 10 ms
- Pressure rating up to 5 bar (73 psi)
- Output: analog or both analog and digital

  • Model Number: FS5001B Series
  • Data Sheet: Date Sheet File
Quantity:
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  • MEMS Mass Flow Sensors
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Product Specification

FS5001B series Mass Flow Sensors Description

FS5001B series mass flow sensors are designed for general purpose flow monitoring and control applications. The sensors directly measure mass flow in the designed channel with trace flow detection capability. The lowest flow it can detect is 20 μL/min. These sensors can readily be applied for manifold flow assembly, leak detection, HVAC control, clean room air flow or nitrogen flush monitoring and control, environmental equipments such as air sampler, analytical instrumentation such as GC spectrometer.

FS5001 can be configured to measure flow full scale from 100 sccm to 1000 sccm (1 SLPM). With a full spectrum of customizable adaptors, it can be plug-and-play in many applications.


FS5001B series Mass Flow Sensors  Features and Applications
- Low mass flow detectable from 0 ~ 200 sccm up to 0 ~ 1000 sccm
- Outstanding accuracy of 2.0%
- Response time < 10 ms
- Pressure rating up to 5 bar (73 psi)
- Output: analog or both analog and digital


FS5001B series Mass Flow Sensors Mechanical Dimensions


FS5001B series Mass Flow Sensors Specifications

Model
FS5001B
Unit
Flow Range
0 ~ 200, 500, 1000 sccm    0 ~ 6 SLPM
Turn-down Ratio
100:1
Accuracy1
±(2.0 ± 0.5FS)
%
Repeatability
± 0.5
%R eading
Null Shift
± 30
mV
Output Shift
± 0.12
%/°C
Response Time2
10 (Default, 5, 10, 20, 50, 100, 200, 500, 1000 selectable)
ms
Output
Linear: I2C, Analog 0.5 ~ 4.5 Vdc

Pressure Drop3
< 900
Pa
Working Pressure
-0.08 ~ +0.5 MPa
Power Supply4
8 ~ 24 Vdc, 50 mA

Operating Current
20
mA
Power Consumption
<220
mW
Analog Output Load
Sourcing: 25
mA
Sinking: 15
Working Temperature
-5 ~ +45
°C

1 Denotes ±(2.0 %Reading + 0.5 %Full Scale). To obtain accurate flow measurement, let the sensor warm up 1 minute at power up.
2 The response time is determined by ADC sampling rate and data process algorithm. The default response time is 10 ms. It can be programmed via I2C communication.
3 The maximum pressure drop is measured at flow rate 1000 sccm. For lower range flow sensors, the pressure drop will be smaller. See section 1.4 for details.
4 One DC power supply is necessary. The required minimum output current is 50 mA. The sensor actually consumesless than that in operation. 


FS5001B series Mass Flow Sensors Additional Specifications

Pins Out 5 Pin, 2.54 mm centers, 0.635 mm square
Calibration Options
Air @ 20°C, 101.325 kPa

Packaging material
Polycarbonate

Dimensions
39.6 x 36.3 x 1.57
mm3
Weight
15 g
Srorage Temperature
-20 ~ +55
°C
Humidity <95 %RH (No icing or condensation)

FS5001B series Mass Flow Sensors Product Selection


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