Phosphine Sensor (PH3 Sensor) - PH3-A1

• Range: 10 ppm PH3 limit of performance warranty
• Sensitivity: 550 to 900 nA/ppm in 11ppm PH3
• Response time t90: < 25 (s) from zero to 5ppm PH3
• Resolution: < 0.03 RMS noise (ppm equivalent)
• Temperature range: -30 to 50°C
• Pressure range: 80 to 120 kPa
• Humidity range: 20 to 90 % rh continuous
• Weight: < 6g

  • Model Number: PH3-A1
  • Data Sheet: Date Sheet File
Quantity:
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  • Phosphine Sensor (PH3 Sensor)
  • Phosphine Sensor (PH3 Sensor)
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Product Specification

PH3-A1 Phosphine Sensor PH3 Sensor Description
Alphasense is expanding its line of electrochemical toxic gas sensors to address industry-specific requirements, including emissions monitoring, process safety, environmental monitoring and VOCs.

Phosphine (PH3)
Our Phosphine sensors cover all hydrides: Silane (SiH4), Diborane (B2H6), Germane (GeH4) and Phosphine (PH3) for the semiconductor industry.


PH3-A1 Phosphine Sensor PH3 Sensor Schematic Diagram


PH3-A1 Phosphine Sensor PH3 Sensor PERFORMANCE
Sensitivity
nA/ppm in 11ppm PH3
550 to 900
Response time
t90 (s) from zero to 5ppm PH3 
< 25
Zero current
ppm equivalent in zero air
< ±0.3
Resolution
RMS noise (ppm equivalent)
< 0.03
Range
ppm PH3 limit of performance warranty
10
Linearity
ppm error at full scale, linear at zero, 20ppm PH3
< -0.6
Overgas limit
maximum ppm for stable response to gas pulse
75



PH3-A1 Phosphine Sensor PH3 Sensor LIFETIME
Zero drift
ppm equivalent change/year in lab air
< ±0.05
Sensitivity
drift % change/year in lab air, monthly test
< 10
Operating
life months until 80% original signal (24 month warranted)
> 24



PH3-A1 Phosphine Sensor PH3 Sensor ENVIRONMENTAL
Sensitivity @ -20°C
%(output @ -20°C/output @ 20°C) @ 11ppm PH3
20 to 70
Sensitivity @ 50°C
% (output @ 50°C/output @ 20°C) @ 5ppm PH3
130 to 160
Zero @ -20°C
ppm equivalent change from 20°C
< ±0.04
Zero @ 50°C
ppm equivalent change from 20°C
< ±0.04



PH3-A1 Phosphine Sensor PH3 Sensor CROSSSENSITIVITY
H2S  sensitivity
 % meaured gas @ 20ppm H2S
< 15
NO2  sensitivity
% meaured gas @ 10ppm NO2
< -30
Cl2    sensitivity
% meaured gas @ 10ppm Cl2
< -30
NO    sensitivity
% meaured gas @ 50ppm NO
< 1
SO2  sensitivity
% meaured gas @ 20ppm SO2
< 60
CO    sensitivity
% meaured gas @ 400ppm CO
< 0.7
H2     sensitivity
% meaured gas @ 400ppm H2
< 0.2
C2H4 sensitivity
% meaured gas @ 80ppm C2H4
< 10
NH3   sensitivity
% meaured gas @ 25ppm NH3
< 0.2
CO2   sensitivity
% meaured gas @ 5% vol CO2
< 0.1



PH3-A1 Phosphine Sensor PH3 Sensor KEY SPECIFICATIONS
Temperature range
°C
-30 to 50
Pressure range
kPa 
80 to 120
Humidity range
% rh continuous
20 to 90
Storage period
months @ 0 to 20°C (stored in original container)
6
Load resistor
Ω
10 to 33
Weight
g
< 6


Matched Transmitter board for PH3-A1 PH3 Sensor

4-20mA Digital Transmitter Board
   • Factory calibration, custom-set for immediate use
   • Digital zero, sensitivity and temperature compensation
   • Digital and 4-20mA output
   • Biased or unbiased operation
   • Calibration and range change

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