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Phosphine Sensor (PH3 Sensor) - PH3-BE

• Range: 2,000ppm PH3 limit of performance warranty
• Sensitivity​: 15 to 35nA/ppm in 800 PH3
• Response time t90: < 30 s from zero to 800 PH3
• Resolution: < 2 RMS noise (ppm equivalent)
• Temperature range: -20 to 50°C
• Pressure range: 80 to 120 kPa
• Humidity range: 20 to 90 % rh continuous
• Weight: < 13g

  • Model Number: PH3-BE
  • Data Sheet: Date Sheet File
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  • Phosphine Sensor (PH3 Sensor)
  • Phosphine Sensor (PH3 Sensor)
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Product Specification

PH3-BE Phosphine Sensor PH3 Sensor Description
Alphasense is expanding its line of electrochemical toxic gas sensors to address industry-specific requirements, including emissions monitoring, process safety, environmental monitoring and VOCs.

Phosphine (PH3)
Our Phosphine sensors cover all hydrides: Silane (SiH4), Diborane (B2H6), Germane (GeH4) and Phosphine (PH3) for the semiconductor industry.

We have also introduced the PH3-BE sensor specifically for food storage where higher concentrations of Phosphine are encountered.

PH3-BE Phosphine Sensor PH3 Sensor PERFORMANCE
Sensitivity
 nA/ppm in 800 PH3
 15 to 35
Response time
 t90 (s) from zero to 800 PH3
 < 30
Zero current
 ppm equivalent in zero air
 < -6 to 20
Resolution
 RMS noise (ppm equivalent)
 < 2
Range
 ppm PH3 limit of performance warranty
 2,000
Linearity
 ppm error at full scale, linear at zero, 800ppm PH3
 -50 to -350
Overgas limit
 maximum ppm for stable response to gas pulse
 5,000



PH3-BE Phosphine Sensor PH3 Sensor LIFETIME
Zero drift
 ppm equivalent change/year in lab air
 < 1.5
Sensitivity drift
 % change/year in lab air, monthly test
 < 4
Operating life
 months until 80% original signal (24 month warranted)
 > 24



PH3-BE Phosphine Sensor PH3 Sensor ENVIRONMENTAL
Sensitivity @ -20°C
 % (output @ -20°C/output @ 20°C) @ 800 ppm PH3
 65 to 85
Sensitivity @ 50°C
 % (output @ 50°C/output @ 20°C) @ 800 ppm PH3
 120 to 140
Zero @ -20°C
 ppm equivalent change from 20°C
 < ±20
Zero @ 50°C
 ppm equivalent change from 20°C
 < ±15



PH3-BE Phosphine Sensor PH3 Sensor CROSS SENSITIVITY
H2S   sensitivity
 % meaured gas @ 20 ppm H2S
 < 110
NO2   sensitivity
 % meaured gas @ 10 ppm NO2
 < -35
CL2    sensitivity
 % meaured gas @ 10 ppm Cl2
 < -30
NO     sensitivity
 % meaured gas @ 50 ppm NO
 < 10
SO2   sensitivity
 % meaured gas @ 20 ppm SO2
 < 25
CO     sensitivity
 % meaured gas @ 400 ppm CO
 < 11
H2     sensitivity
 % meaured gas @ 400 ppm H2
 < 2
C2H4 sensitivity
 % meaured gas @ 80 ppm C2H4
 < 60
NH3  sensitivity
 % meaured gas @ 25 ppm NH3
 < 0.1
CO2  sensitivity
 % meaured gas @ 5% CO2
 < 0.1



PH3-BE Phosphine Sensor PH3 Sensor KEY SPECIFICATIONS
Temperature range
 °C
 -20 to 50
Pressure range
 kPa
 80 to 120
Humidity range
 % rh continuous
 20 to 90
Storage period
 months @ 0 to 20℃ (stored in original container)
 6
Load resistor
 Ω (recommended)
 10 to 33
Bias voltage
 mV above analogue ground
 not required
Weight
 g
 < 13

Matched Transmitter board for PH3-BE PH3 Sensor

4-20mA Digital Transmitter Board
   • Factory calibration, custom-set for immediate use
   • Digital zero, sensitivity and temperature compensation
   • Digital and 4-20mA output
   • Biased or unbiased operation
   • Calibration and range change

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