Mass Air Flow Sensor - PMF2000 Series

• Unsurpassed performance in a robust and cost effective package
• “Solid state” sensing core (no surface cavity or fragile membrane) resistant to clogging and pressure shock
• Highly accurate (4% reading typ.)
• Fast response time (5 ms typ.)
• Linear output and temperature compensation
• Long-term stability with minimal null drif

  • Model Number: PMF2000 Series
  • Data Sheet: Date Sheet File
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  • Mass Air Flow Sensor
  • Mass Air Flow Sensor
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Product Specification


PMF2000 Series Mass Air Flow Sensor Description:

    PMF2000 features Posifa’s third-generation thermal flow die, benefiting from the latest innovations in microfabrication. The sensor die uses a pair of thermopiles to detect changes in temperature gradient caused by mass flow, delivering excellent signal-to-noise, and repeatability. The “solid state” thermal isolation structure on the sensor die eliminates the need for surface cavity or fragile membrane used in competing technologies, making the sensor resistant to clogging and pressure shock.

    The PMF2000 series includes the analog output PMF2000V and the digital I²C output PMF2000D.

    The supported max flow rate ranges from 200 sccm to 10 SLM. The sensors are temperature compensated over the temperature range of 0 to 50 °C. The linearized output provides maximum flexibility and ease-of-use. 

 

PMF2000 Series Mass Air Flow Sensor Features

• Unsurpassed performance in a robust and cost effective package

• “Solid state” sensing core (no surface cavity or fragile membrane) resistant to clogging and pressure shock

• Highly accurate (4% reading typ.)

• Fast response time (5 ms typ.)

• Linear output and temperature compensation

• Long-term stability with minimal null drif

 

PMF2000 Series Mass Air Flow Sensor Applications

• Oxygen concentrators

• Nebulizers

• CPAP equipment

• Leak detection

• Spectroscopy

• Mass flow controller

• Fuel cell control

• Environmental monitoring

 

PMF2000 Series Mass Air Flow Sensor Maximum Ratings:

• Operating Temperature: -25 to 85 °C

• Calibrated Temperature Range: 0 to 50 °C

• Storage Temperature: -40 to 90 °C

• Humidity: 0 to 100% RH, non-condensing

• Shock: 100 g peak (5 drops, 3 axis)

• Operating Pressure: 25 psi

 

PMF2000 Series Mass Air Flow Sensor Specifications:

Test Conditions: Vin=10±0.01VDC, Ta=25°C. Relative Humidity: 40%

SPECIFICATIONS

MIN

TYP

MAX

UNIT

CONDITIONS

PMF2101

0

 

200

sccm

 

PMF2102

0

 

1000

sccm

 

PMF2103

0

 

2000

sccm

 

PMF2104

0

 

3000

sccm

 

PMF2105

0

 

4000

sccm

 

PMF2108

0

 

10

SLM

 

 

Output Voltage (V)2

1 to 5

VDC

 

Null Voltage (V)

0.95

1

1.05

VDC

 

Output Count (D)

256 to 16124

Count

 

Null Count

156

 

356

Count

 

Null Drif

 

 

0.2

% F.S.

Per year

Repeatability

 

0.1

 

% F.S.

 

Accuracy3

 

1%

 

F.S.

0 to 25% F.S.

 

4%

 

Reading

25 to 100% F.S.

Resolution (D)

 

14

 

Bit

 

Response Time4

 

5

 

mSec

 

Supply Voltage (V)

6

10

16

Vdc

 

Supply Voltage (D)

4.75

10

16

Vdc

 

Current

 

21

26

mA

 

Wetted Materials

Silicon carbide, epoxy, PPE+PE, FR4, and silicone as static seal

1. SLM: standard liter per minute. Standard conditions: 0 °C and 1 atmosphere.

2. V refers to the analog version of PMF2000, and D refers to the digital I2C version.

3. Maximum deviation in output from nominal over the entire calibrated flow range and temperature range. Errors include offset, full scale span,

linearity, flow hysteresis, repeatability and temperature effects over the compensated temperature range.

4. 10% to 90% rise time of the flow sensor to electrically respond to any mass flow change. May be affected by the pneumatic interface



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