Micro-pirani Vacuum Sensors - PVC1000 Series

• Ultra low power consumption < 5 mW
• Fast Response Time < 5 mSec
• Suitable for gas volume as low as 0.1 cm3
• Long Term Stability
• Can be cleaned by immersing in solvent, prolonging useful life

  • Model Number: PVC1000 Series
  • Data Sheet: Date Sheet File
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  • Micro-pirani Vacuum Sensors
  • Micro-pirani Vacuum Sensors
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Product Specification

PVC1000 Series Micro-pirani Vacuum Sensors Description:

    Posifa’s PVC1000 series of MEMS MicroPirani Vacuum Sensors offer a breakthrough vacuum measurement solution that enhances miniaturization while delivering ultra-low power consumption, long lifetime, minimal field maintenance, and low cost.

    Based on the principal that the thermal conductivity of gases is proportional to pressure in the low vacuum range, the Posifa sensors measure minute changes in resistance to a heated element resulting from heat transfer to the surrounding gas.

PVC1000 Series Micro-pirani Vacuum Sensors Features

• Ultra low power consumption < 5 mW

• Fast Response Time < 5 mSec

• Suitable for gas volume as low as 0.1 cm3

• Long Term Stability

• Can be cleaned by immersing in solvent, prolonging useful life


PVC1000 Series Micro-pirani Vacuum Sensors Applications:

• Leak detection in any closed system maintained under primary vacuum

• Vacuum packing machines

• Portable digital vacuum gauges


PVC1000 Series Micro-pirani Vacuum Sensors Absolute Maximum Ratings:

• Operating Temperature: -25 to 85 °C

• Storage Temperature: -40 to 90 °C

• Shock: 100 g peak (5 drops, 3 axis)


PVC1000 Series Micro-pirani Vacuum Sensors Electrical Characteristics:

Test Conditions: Heating Current = 7mA, Ta=25°C

SPECIFICATIONS

MIN

TYP

MAX

UNIT

CONDITIONS

Range

10-3

 

30

Torr

 

Resolution1

 

0.25

 

Torr

5-30 Torr

 

0.05

 

Torr

2 to 5 Torr

 

0.005

 

Torr

10-3 to 2 Torr

Accuracy1

 

±10

 

% reading

> 5 Torr

 

±5

 

% reading

< 5 Torr

Measurement Resistor

(Class 1)

130

160

180

Ohm

At 25°C

Reference Resistor

(Class 1)

250

320

370

Ohm

At 25°C

Measurement Resistor

(Class 2)

100

120

140

Ohm

At 25°C

Reference Resistor

(Class 2)

190

320

290

Ohm

At 25°C

Resistor TCR

 

0.0025

 

/°K

 

Humidity

0

 

100

%

RH, Non-condensing

Heating Current3

 

6.5

7.5

mA

 

Operating Temperature

Range

-25

 

85

°C

 

Storage Temperature

-40

 

90

°C

 

Power Consumption

 

 

5

mW

10-3 to 30 Torr

Shock Resistance

 

 

1000

g

 

Overpressure

 

 

27.5

Bar

 

Measurable Gas Volumes

 

0.1

 

cm³

 

Response Time

 

5

 

mSec

1 For reference only. Actual resolution/accuracy depends on the associated circuit.

2 For class 1, 6.5mA is recommended. For class 2, 7.3mA



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