Thermal Conductivity Sensor for miniature Pirani gauge - MTCS2300

•Ultra-fast response time < 50 ms
•Easy temperature compensation due to similar heating and reference resistors, realized in micro structured platinum-nickel thin film process
•Insensitive to mounting position
•High shock survivability (>1000 G) due to small size
•Resistance to corrosive gas as Hydrogen, using gold contact

  • Model Number: MTCS2300
  • Data Sheet: Date Sheet File
Quantity:
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  • Thermal Conductivity Sensor for miniature Pirani gauge
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Product Specification

General description

    The MTCS2300 pressure gauge, using thermal conductance measurement according to Pirani principle, is a dedicated MEMS device mounted in a small TO8 or TO39 package. The sensor incorporates one large micro-machined low stress silicon nitride membrane with two thin film resistors for heating and two reference resistors for compensation on silicon bulk using Ni-Pt resistors MEMS technologies in a miniature package. This MEMS structure, combined with simple CMOS standard integrated circuits for current source and temperature analysis, is a suitable choice for size-critical vacuum OEM sensing solution requiring ultra-low power consumption with an excellent signal-to-noise ratio and resistance to corrosive gas.

 

Applications

Miniature Pirani devices and sensors have applications including

Leak detection

Propulsion

Semiconductor manufacturing (e.g., sputtering chambers)

Freeze dryers

Vacuum meat packing machines

Vacuum coating

Load locks

In general, pressure measurement following Pirani principle in rough environments with power and size constraints, such as in analytical portable instruments or small mechanical pumping systems

 

Silicon Pirani gauge MTCS characteristics

The packaged sensor is available with different possible packaging options:

Only the sensing die, realizing a miniature hot wire in air

The sensing die with a silicon lid, creating a gap between the hot and cold part of 10 µm or 20 µm. These small gaps enhance the sensitivity of the Pirani principle at pressures between 100-1000 mbar

 

Features

Extended measuring range from 10-4 to 1000 mbar

MEMS Micro machined silicon sensor with perfect matching of the sensor geometry and sensor resistors

Ultra small sensor gas volume such as < 0.1 cm3 

Pirani microwire-to-wall distance adjusted by silicon micromachining, down to 10 µm or 20 µm with excellent sensor reproducibility

Ultra-low power consumption in operation (< 6 mW) due to the use of MEMS based silicon sensor with large integrated resistors such as 250 Ohms and small heated mass

Ultra-fast response time < 50 ms

Easy temperature compensation due to similar heating and reference resistors, realized in micro structured platinum-nickel thin film process

Insensitive to mounting position

High shock survivability (>1000 G) due to small size

Resistance to corrosive gas as Hydrogen, using gold contact


 

MTCS2301/MTCS2302 sensor electrical characteristics

 

Symbol

Min

Typical

Max

Units

Measuring resistor (Rm1 and Rm2)

Rm1 and Rm2

110

120

135

Ω

Reference resistor

Rt1 and Rt2

240

270

300

Ω

Absolute (Rm1-Rm2)

 

 

< 1.5

 

Ω

Absolute (Rt1-RT2)

 

 

< 5.5

 

Ω

Rtx/(Rm1 + Rm2)

 

 

1.0 to 1.2

 

 

Thermal coefficient

α

0.0045

0.0050

0.0055

/°K

Defined gas gap between hot and cold part

 

10

20

200

µm

 

Sensor package information

MTCS sensor in TO8 metallic header, with 8 isolated leads (TO8 size)

Package size:

External diameter: 13.00 mm

Internal diameter: 10.85 mm


 

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