Piezoresistive Silicon Pressure Sensor - SPA401 Series

• 1.5 to 100 PSI
• -40 to 125°C Temperature Range
• Calibrated and compensated Output
• Supply voltage 2.7 to 5.5VDC
• High accuracy
• Medical Devices
• Process Control & Monitoring Systems
• Environmental Controls
• HVAC
• Laboratory & Calibration Applications

  • Model Number: SPA401 Series
  • Data Sheet: Date Sheet File
Quantity:
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  • Piezoresistive Silicon Pressure Sensor
  • Piezoresistive Silicon Pressure Sensor
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Product Specification

Piezoresistive Silicon Pressure Sensor Module

SPA401 Series Pressure Sensors General Description
The SPA 401 Series offers piezoresistive silicon, stainless steel pressure sensors. Product highlights include excellent overpressure characteristics and chemical resistance. Media isolated sensors are designed to operate in hostile environments and yet give the outstanding sensitivity, linearity, and hysteresis of a silicon sensor. This pressure sensor is compatible with 316L stainless steel, a type of steel that increases corrosion resistance, improves resistance to pitting from chloride ion solutions, and provides increased strength at high temperatures.

The sensor chip is housed in a fluid-filled cylindrical cavity and isolated from measured media by a stainless steel diaphragm and body. The oil-filled cavity in this unique design of pressure sensor is at a minimum volume so the accuracy is greatly improved. The SPA 401 silicon pressure sensor is a thermally compensated device and has am amplified output with a ratiometric output signal (10% to 90% of supply voltage). This new pressure sensor offers design engineers excellent performance in various applications, especially for low pressure and smaller solutions. 

SPA401 Series Pressure Sensors Features

• 1.5 to 100 PSI
• -40 to 125°C Temperature Range
• Calibrated and compensated Output
• Supply voltage 2.7 to 5.5VDC
• High accuracy (max 0.25% linearity and max 0.05% hysteresis)

SPA401 Series Pressure Sensors Applications
• Industrial
• Vacuum technology
• Pneumatic and hydraulic components (e.g. valves, pumps)
• Level measuring (e.g. environmental technology)

SPA401 Series Pressure Sensors Specifications 
All parameters are measured at supply voltage 5V reference conditions unless otherwise specified

Standard Pressure Ranges
PSI
bar
Output signal (Offset)
Output signal (FSO)
Proof pressure
[PSI/bar]
Negative pressure
[PSI/bar]
Burst pressure
[PSI/bar]

@ Vs = 5 V

@ Vs = 5 V
1.5
0.1 10 % Vs
0.5 V
90 % Vs
4.5 V
15
1 -15
-1
22
≥ 1.5
3 0.2 30 2 -15
-1
45 ≥ 3
5 0.35 30 2 -15
-1
45 ≥ 3
15 1 75 5 -15
-1
112
≥ 7.5
30 2 150 10
-15
-1
225 ≥ 15
50 3.5
250 17.5 -15
-1
375 ≥ 25
100 7 500 35 -15
-1
750 ≥ 50
Supply / Performance

min.
typ.
max.
Supply voltage Vs                 [V]
2.7
5.0
5.5
Current consumption          [mA]
2.5 max.
Linearity              [% FSO BFSL]
- 0.25
±0.1
0.25
Hysteresis                      [%FS0]
- 0.1
±0.05
0.1
Output load resistance        [kΩ]
≥ 5
Insulation resistance          [MΩ]
50 (between housing and sensor chip) @ 50 V DC
Thermal errors

pn ≤ 5 psi 
pn ≤ 5 psi
Thermal error offset        [% FSO]
±1.0
±0.75
Thermal error span         [% FSO]
≤ ±1.0
≤ ±0.75

0 to 70 °C (32 to 158 °F)
0 to 85 °C (32 to 185 °F)
Operating temperature ranges
Media
-40 to 125 °C  (-40 to 257 °F)
Storage
-40 to 125 °C  (-40 to 257 °F)
Mechanical stability
Vibration
10 g RMS (20 to 2000 Hz)
Schock
100 g / 11 ms
Electrical connections
Standard
JST connector
Materials / Filling fluids
Housing
Stainless steel 316L (1.4404)
Diaphragm
Stainless steel 316L (1.4435)
Media wetted parts
Housing, diaphragm
Filling liquid
Silicone oil
Miscellaneous
Installation position
any
Protection class
IP 00
Weight
Standard: approx. 10 g
Sealing
O-Ring 15.5 x 1.5 (material: FKM)

SPA401 Series Pressure Sensors Ordering Codes

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